Time Resolved Photothermal Deflection Measurement of Semiconductormaterials Thermal Parameters
نویسندگان
چکیده
A time resolved measurement of the thermaly induced surface deformation has been carried out using visible light-based photothermal deflection technique. Thermal conductivity coefficients were determined for several semiconductor materials. Problems of the experimental data interpretation with respect to the effect of 2D/3D heat source excitation and the potential advantages of the time resolved data are discussed.
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